Solution processing of microcavity for BioMEMS application

Vu Nam Luong, Yoshiaki Ukita, Yuzuru Takamura, Tadaoki Mitani, Tatsuya Shimoda, Thi My Dung Dang and Mau Chien Dang

Abstract

Compared to the conventional silicon-based technology, the solution process appears to be a revolution in the field of micro/nanofabrication due to its advantages of high efficiency in material and energy consumption and the use of low cost material. In this paper, we introduce a new approach to fabricate BioMEMS devices using this novel technology to make microcavity. Zirconium oxide patterns were formed on the silicon substrate simply by spin coating its precursor and thermal imprinting technique. We used poly-propylene carbonate (PPC) for the sacrificial material due to its unique pyrolysis property. The PPC was coated on the ZrO patterns and excess film was etched by oxygen plasma but retaining PPC structure between the lines of ZrO pattern. Then another ZrO layer was coated to encapsulate the PPC. The final microcavity structures were obtained by just baking the substrate by pyrolyzing the PPC. The obtained results show the approach's prospect of becoming an ideal alternative for the current BioMEMS micro/nanofabrication technologies