TiO2 thin film based transparent flexible resistive switching random access memory

Kim Ngoc Pham, Van Dung Hoang, Cao Vinh Tran and Bach Thang Phan

Abstract

In our work we have fabricated TiO₂ based resistive switching devices both on transparent substrates (ITO, IGZO/glass) and transparent flexible substrate (ITO/PET). All devices demonstrate the reproducibility of forming free bipolar resistive switching with high transparency in the visible light range (~80% at the wavelength of 550 nm). Particularly, transparent and flexible device exhibits stable resistive switching performance at the initial state (flat) and even after bending state up to 500 times with curvature radius of 10% compared to flat state. The achieved characteristics of resistive switching of TiO₂ thin films seem to be promising for transparent flexible random access memory