Measurement of electron energy band structure in the valence band of MgO thin film with and without a sprayed functional layer by secondary electron emission from Auger neutralization

Joon Ho Choi, Chang Gil Son, Young June Hong, Byoung Choo Park, Han Sup Uhm and Eun Ha Choi

Abstract

We have investigated the electron energy band structure of MgO thin film with and without a sprayed functional layer (FL), based on the Auger neutralization theory by a gamma-focused ion beam (γ-FIB) system. We have measured the secondary electron emission characteristics of MgO thin film with and without the sprayed FL, and from which their respective energy band structure f_e(α) functions have also been investigated by using an He ion beam with ionization energy 24.58 eV through Fast Fourier Transform (FFT) and inverse-Fast Fourier Transform (IFFT)