A microcavity based on a porous silicon multilayer

Thuy Chi Do, Huy Bui, Thuy Van Nguyen, The Anh Nguyen, Thanh Hai Nguyen and Van Hoi Pham

Abstract

We present a new result for the wavelength-selective characteristics of a 1D photonic microcavity based on porous silicon. These properties are studied in both experimentation and simulation. The 1D Fabry–Perot cavity is fabricated by the electrochemical etching of a low-resistivity silicon wafer with modulation of applied current densities. The simulation relies on the transfer matrix method (TMM) to design and predict the optical properties of a 1D photonic microcavity as well as the relation between anodization parameters with reflection spectra. The experimental results show that the elaborated porous silicon photonic microcavities have the wavelength-selective property in a controllable range of 550–775 nm. We have grown cavity structures of 20 stacked layers and the line width at full-width half-maximum (FWHM) of the transmission band of cavity is 20 nm, centered at 643.27 nm. Measured spectral characteristics of photonic microcavity agree with the simulation results